000 00486nam a22001817a 4500
005 20251108170603.0
008 250721s1990 xx 000 0 eng d
082 1 4 _a621.38152/MOR
100 1 _aMorgan, D. V.
245 1 3 _aAn introduction to semiconductor microtechnology /
250 _a2ND ED
264 1 _aNew York :
_bJohn Wiley & sons,
_c1990.
300 _a208p.: index
650 1 7 _aSemiconductor Devices
650 1 7 _asemiconductors
942 _2ddc
_cBK
999 _c44163
_d44163